SUSS MicroTec Lithography
MA6
8년
주장비
기타
기계가공·시험장비 > 반도체장비 > 리소그래픽장비
2005-11-17
252,280,033원
고정형
기타
30,000원
Clean Room에서 사용하는 MEMS Nano소자연구용 Lithography 장비임
MASK ALIGNER (MODEL: MA6) 1. SUSS MA6 MASK ALIGNER 2. SUSS M306 SPLITFIELD MICROSCOPE CPL. WITH TURRET FOR MA6/BA6 3. OBJECTIVE UMPLFL 5X/0.15 4. OBJECTIVE UMPLFL 10X/0.30 5. OBJECTIVE LMPL FL 20X/0.40 6. VIDEO IMAGING SYSTEM FOR MICROSCOPES M500/M306 7. MICROSCOPE ILLUMINATION 85W/M500/M306/MA6/BA6/LH1000 8. EXPOSURE UNIT MA6/BA6/1000W 9. OPTICS UV400/PROX/CONT/W-150/LH1000 10. MASK HOLDER MA6/BA6/BL/CONT/M-4-7/W-3 11. MASK HOLDER MA6/BA6/BL/CONT/M-5-7/W-100 12. CHUCK MA6/BA6/VAC/W-3 13. CHUCK MA6/BA6/VAC/W-100 14. LAMP POWER SUPPLY UNIT CIC1200 FOR LH1000 15. SUSS 2-CHANNEL LIGHT-SENSOR 365/405NM FOR CIC 16. LAMP ADAPTER LH1000/HBO 1000W 17. VIBRATION ISOLATION AND DAMPING SYSTEM