㈜시스넥스
MARVEL260NTK
주장비
교육
기타 > >
2005-07-05
480,413,379원
고정형
건별
57,600,000원
* Application : GaN, AlGaN Growth
* Heater : RF induction heating
Max. power 30KW
* Susceptor : SiC coated graphite
* Reactor : Vertical laminar flow stainless steel
water cooled jacket and base
* Temp : Max 1200℃
* Rotation : speed up to 200 rpm
* Pressure : 20 ~ 760 torr
* Heat / cooling rate :
2mm(from 450 to 1000 ℃)
3mm(from 1000 to 450 ℃)
* MO temp. control : Thermostat
accuracy 0.05℃, range -20℃ to +60℃