Varian
Viision-80
9년
주장비
교육
기계가공·시험장비 > 반도체장비 > 이온주입장치
2005-01-14
200,000,000원
고정형
원
1.성능
Energy Range
Operational 2-80kev
Specification B+:10-80kev AS+,P+:40-80kev
Maximum Beam Current
Species
ENERGY (keV)
10
20
30
40
50
60
70
80
B+mA
6
7
7
9
10
10
10
10
BF2+mA
4
7
8
9
9
9
9
9
P+mA
6
10
14
20
25
25
25
25
As+mA
6
10
14
20
25
25
25
25
Stability +/- 10% after warmup
Implant Dose Accuracy
Specification Range 5E11~1E16
Uniformity 0.5%
Repeatability 0.7%
Wafer Cooling 100 @ 3000 watts
Wafer Sizes 150mm ,200mm
Reliability
Wafer Breaks 1:20000
Process Angles
Tilt 0 ~ 7 dergee
Twist 0 ~ 360 , automatic.recipe control