Nachi
SHG-20P
9년
주장비
생산
기계가공·시험장비 > 절삭장비 > 밀링장비
2003-08-01
196,783,008원
기관의뢰
고정형
시간별
35,000원
웨이퍼를 임의의 사각형으로 절단하는데 사용
m - Indexing accuracy cumulative error : 0.002mm/160mm4. Z-axis(spindle vertical movement) - Rem
1. Available wafer dicing size : piece to 6"2. X-axis(chuck table horizontal movement) - Workpiece width setting range : 0.001mm~160.00- Cutting range : 192mm- Cut speed : 0.1~300mm/s3. Y-axis(spindle forward-rearward movement) - Maximum stroke : 162mm- Indexing step : 0.0001mm- Index setting range : 0.0001mm~160.0000mm - Indexing accuracy single error : 0.002mm - Indexing accuracy cumulative error : 0.002mm/160mm4. Z-axis(spindle vertical movement) - Remaining amount input range : 0.0001mm~32.0000mm- Maximum cutting stroke : 32mm- Repeating accuracy : 0.0005mm- Indexing repeat accuracy : 0.001mm/5mm(range) 5. θ-axis(chuck table rotation movement) - Maximum rotating range : 170°- Minimum index : 0.01° - Positional Accuracy (Pitch) : 25"- Positional Accuracy (Yawing) : 20"- Maximum speed of Tx, Ty : 15°/sec