1. Evarporator System 1sys 1-1 Process chamber 1-1-1 Deposition chamber 1-1-2 Loadlock chambe 1-1-3 Sample Transfer Unit 1-2 Vacuum Pumping Unit 1Set 1-3 Substrate Rotation Unit 1Set 1-4 Substrate Heating unit 1Set 1-5 Vacuum Gauge Controller 1set 1-6 E-Gun & Power Supply 1Set 1-7 Thermal Source & Power Supply 1Set 1-8 Gas Supply Unit 1Set 1-9 Thickness Monitor Control Unit 1Set 1-10 Frame & Control Box 1Set2. I.C.P-R.I.E & PE CVD System 1SYS 2-1 Etcher Chamber 1Set 2-2 PE CVD Chamber 1Set 2-3 LoadLock Chamber 1Set 2-4 Main Frame 1Set 2-5 Main Controller 1set