ㅇ 주요사양(1) OLED Deposition chamber 1set - Low temperature cell 수량 : 7개 . Temperature : RT ~ 400℃ . Cell volume : 4cc~10cc . Crucible material : Al2O3 . Deposition rate : 0.02 Å/s ~3Å/s . 개별 Cell shutter 7개 포함 - Middle temperature cell 수량 : 2개 . Temperature : RT ~ 900℃ . Cell volume : 4cc~10cc . Crucible material : BN or Quartz . Deposition rate : 0.1 Å/s ~1Å/s . 개별 Cell shutter 2개 포함 - Thermal boat 수량 : 1개 . Cell volume : 10cc . Crucible material : BN or Tungsten . Max rate : 10Å/s . 개별 Boat shutter 1개 포함 (2) Load Lock chamber 1set - Glass Size : Glass: 100mm±0.05mmX100mm±0.05mm (thickness : 0.3~1.1mm±0.02mm) - Chamber Type : Square & Vertical - Loading capacity : Glass(4 sheets), Mask (2sheets) - Ultimate Pressure : ≤ 5 x 10E-3 Torr(3) Glove box 1set- Glove box : 1.5인용( 3gloves)- Sensor : Moisture ≤ 1.0ppm, Oxygen ≤ 1.0ppm- UV Curing unit : Wave length 365nmLamp Metal halideLife time : 1,000hrs