A. FE-SEM1) Electron Source : Schottky field emitter. 2) Resolution : 0.8nm @ 15kV or more. 3) Probe Current : 4pA to 20nA. 4) Magnification : 2x to 1,000,000x 5) Compucentric Mode stage, Safe navigation, Image stitch 6) Economic Quiet mode Vaccum 7) Energy Dispersive x-ray Spectrometer system ⑴DD(Silicon Drift Diode) Detector, Single Window / 10mm2 ⑵esolution : 129eV, Drift Compensation softwareB B. Probe Workstation : 1) Removable 4-nanomanipulation and probing system 2) Speed : A,B = up to 10mm/s. C=up to 2mm/s 3) Resolution : A axis 5nm, B axis 3.5nm, C axis 0.25nm 4) Current measurement limit : 1 pA~200mA 5) Signal conductor resistance : 0.9~7 ohms 6) measurement : C-V, EBIC-RCI, 4-PP