-Acid wet station system .Main body size(mm) : 1800 × 100 × 1985 .Frame : SS41 Square pipe frame with anti-corrosive paint coated .Wet station module material : PTFE 15t -Organic wet station system .Main body size(mm) : 1800 × 100 × 1985 .Frame : SS41 Square pipe frame with anti-corrosive paint coated .Wet station module material : SUS3616 & EP -Max. substrate size(mm) : 310×250×1, 5sheet cassette 1EA