Load-lock chamber :＜1.3×10-3 Torr Buffer chamber :＜1.0×10-5 Torr
1. MAIN VACUUM CHAMBER -(1set)
- Chamber Body : I.D2300m/m x 2500m/m(L) with Door
- Main Valve Port : 700m/m x 450m/m (22" -Angle Valve)
- Rough Valve Port : 6" (5"-Angle Valve)
- Piping Line : 5"