1.Box Type Vertical Furnace System : 1set
-Furnace : Kantal A1 Heater(1 Zone Control) / (Process Temp.)400-800℃
-Load Station: Loading / Unloading Manual Type
-Controller : PLC
-Gas System : (N2)20slm 5slm / (O)\2)500sccm
-Controller : PLC Control
-Gas Piping : SUS316L EP
-UP-350 UT-350 Temp. Controller
-Vacuum Pump System(Diffusion & Rotary Pump): (Base Pressure)1*10(-5)Torr
-Interlock System
2.Quartz Ware & Accessory Parts : 1set
-Process Tube Boat