성능 및 사양 1. Sxan Range : 50um * 50um*12um 2. Direct on-axis optical microscope : 1um resolution 3. Acoustic Enclosure & Vibration Isolation 4. Variable Enhanced Conductive AFM : 10mA-10nA measurable 5. Enhanced EFM : DC-EFM, SKPM, PFM, software, and an EFM test sample 6. External High Voltage Toolkit : DC bias range-2kV(external), 10V(internal) AC bias range-10V 7. Temperature Control Stage: Form room T to 450℃