Electron Optics 1. Magnifications- x20 - x10,000 (Digital zoom : x2, x4) 2. Accelerating voltage : 15kV 3. Observation mode : Non-coating - Standard Mode - Charge-up reduction mode 4. Specimen stage traverseX : 15 mmY : 18 mm 5. Maximum specimen size : 70 mmΦ 6. Maximum sample thickness : 20 mm 7. Electron Gun - Pre-centered cartridge filament 8. Detecting system - High-sensitive semiconductor BSE detector 9. Evacuation system - Turbomolecular pump : 30 l/s x 1 unit - Diaphragm pump : 1㎥/h x 1 unit 10. Standard equipments1) Main unit 1set2) Diaphragm pump 1set11. Dimensions and weight1) Main unit : 338(W) x 564(D) x 513(H)mm, 58.5 kg2) Diaphragm pump : 145(W) x 256(D) x 217(H)mm, 4.5 kg12. Installation condition 1) Room temperation - 15 ~ 30℃2) Humidity - 70% RH or less3) Power source - Single-phase AC 100V, 500VA4) Grounding - 100Ω or better