1. LN2 free high-Speed SDD detector a) Detection range : Beryllium (4) up to Americium(95) b) Super Ultra Thin window c) 10 mm2 active area d) Energy resolution < 127eV (Mn kα), guaranteed at 100,000 cps e) Ultra high-speed operation (up to 275 kcps output count rate) f) Maximum input count rate : 750 kcps g) Vibration free cooling method no image distortion at the SEM2. Signal Processing Unit a) Acquisition board used to collect and digitize the X-ray signal input from the SDD type detecting unit. b) Beam Control Package and Electron Microscope Interface kit c) versatile interfaces for data acquisition and remote control d) Use saved spectra calibration data at each processing time and channel without any calibration