1)working size:max 6inchx6inch2)degree of vacuum:2x10E-2 torr3)device thickness:0.4, 0.8, 1.0, 1.4, 2.2t4)door open/close method:upside open/close5)lc feeding method:contack and cassette up-vacuum chamber unit1)body material : sus3042)service port-roughing port, gauge port, n2 gas port, climb port, spare port3)door-door open/close:hinge type