특징 및 구성 - Alignment Method : 6축 자동정렬 - 용접방식 : 3-point(Yag Laser) - Lens Alignment Unit resolution : 3 axis(2㎛/pulse) - Lower Chuck Rotation : 0.17°/puls 1. Alignment Unit for XY Stage 1) Number of control axes : Six axes (X, Y, Tx, Ty, θ, Z1) motorized stages. 2) Travel range of X-Y-axes : 20mm 3) Travel range of Z : 60mm 4) Travel range of Tx and Ty : ≥ ±5° 5) Travel range of θ : 360° 6) Resolution of X, Y : 0.05㎛ 7) Resolution of Z : 0.05㎛ 7) Resolution of Tx, Ty-axis : 0.00125°/0.001° 8) Resolution of θ : 0.008° 8) Maximum speed : 10mm/sec 9) Origin detection function of all axes. 2. Lower Chuck of Bi-Di OSA Type Package 1) Applicable Works - Bi-Di OSA Type 3. Lens Alignment Unit for XYZ Stage 1) Number of control axes : Three axes (LX, LY, LZ) motorized stages. 2) Travel range of X-Y-axes : 15mm 3) Travel range of Z : 15mm 4) Resolution of X, Y : 2㎛/pulse 5) Resolution of Z : 2㎛/pulse 4. High Chuck Rotation 1) Number of Control axes : One axes(Tz) 2) Travel range : 360° 3) Resolution : 0.17°/pulse