특징 및 구성 - Alignment XY Stage Resolution : 0.05㎛ - LD Controller With TEC Accuracy : ±2.5% - Application PKG : Bi-Di Module Package 1. Alignment Unit for XY Stage 1) Number of control axes : Six axes (X, Y, Tx, Ty, θ, Z1) motorized stages. 2) Travel range of X-Y-axes : 20mm 3) Travel range of Z : 60mm 4) Travel range of Tx and Ty : ≥ ±5° 5) Travel range of θ : 360° 5) Resolution of X, Y : 0.05㎛ 6) Resolution of θx, θy-axis : 0.00125°/0.001° 7) Maximum speed : 10mm/sec 8) Origin detection function of all axes. 2. Laser Diode Controller with TEC 1) Output current range : 0~50mA, 0~100mA 2) TEC controller: Imax of 4A, Vmax of 8V 3) Setpoint resolution : 1uA, 2uA 4) Setpoint accuracy : ±0.05% of FS 5) Compliant voltage : 0-10V adjustable 6) Resolution : 50mV 7) Accuracy : ±2.5% 8) Photodiode reverse bias : 0-5V adjustable 9) Temperature control range : -100℃ to 199℃ 10) Temperature Stability : ±0.01℃ 11) Temperature setpoint resolution : 0.01℃ 12) Temperature setpoint accuracy : ±0.1℃ 3. Lower Chuck of Bi-Di Mini Flat Type Package 1) Applicable Works - Bi-Di Mini Flat Type&N&T&I&S&null&N&T&I&S&null