SPM(원자탐침현미경)

사양
1. Sample : Up to 200mm and 12mm Thick
2. Magnetic Sample : Less than 15mm and 6mm Thick
3. Resolution : 2
4. X-Y scan Range : ~90 Square
5. Z(vertical) Range : 6
6. Vertical Noise Floor : 0.05nm RMS
7. Integral Linearity (X-Y) : 1% Typical
8. Integral Linearity (Z) : 1% Typical
9. Magnification : 25~108배

용도
1. Semiconductor, Polymer, Material 등 그외 다양한 분야에서 시료의 물리적 특성 측정
2. Nano scale의 표면 측정
3. 경도측정