1. Main Process Chamber---------1식

1) Chamber Material: SUS304, Al6061

2) Chamber Wall: Electrical Polishing

3) Ultimate Pressure: 3x10-7 Torr

4) Process Uniformate: ±5%

5) Chamber Type: Cylinder door Type 및 Front Door

Type

6) Sample Size: Max Mask Holder Size 4“

7) Substrate Receiving module : Sample Stage

Z-motion & Rotation unit( Pneumatic)

2. Vacuum Pumping Module

1) Main Process Rotary Pump-----1식

- Pumping Speed: 181L/min

- Power: 220V/,단상

- In net Port: ISO100

- Outlet Trap 설치

2) Turbo Pump ------1식

- Model : IGM-402

- Pumping In-net : ISO100

- Pumping Performance: 150L/sec
3. Vacuum Gauge-----1식

- Model : IGM-402

- Ion(1set) & Convection Gauge

- Sensor Port : CF2.75“

- Controller & Cable포함


4. DC Power supply --------------------------- 1SET

- Out Put Power: 1000V, 1A

- Power Connector : N Type

- Cooling Type : Air

- Size: 19” Full Rack

- In-Put Power :AC 220V
5. Gas Module-------1식

- Gas명: Ar

- Max Range & Fitting : 200sccm and ¼” vcr type

- Controller Type: MFC & Readout Box(4Ch까지 확장가능)

- Gas Stop V/V 장착


6. Magnetron Sputtering Gun-----2set

- Size: Target Size기준 2”

- Cooling Type: Water

- Input Connector : “N“ Type

- Material: Copper, SUS304

- Cylinder Type Shutter장착
7. Vacuum Valve

7-1) Roughing & Fore line Valve ( NW25) ----2ea

- Type : Pneumatic (ISO25)

7-2) Main Gate V/V CF 4.5” ----1ea

- Type: Pneumatic (ISO100)

7-3) Vent Valve ---------1ea

- Type: Pneumatic(1/4”VCR)

8. Substrate Heating Module

- Max Temp & controller : 500℃

- Heather Type :Halogen Ramp

- Sample Stage 용 AC Brake Motor

- Sample Mask Holder제작

- Rotary Motion Feedthough

- Cooling Type: Water
9. Throttle Valve(ISO100)

- Fapper Seal: NO

- Throttle Valve Controller

- Baratron Gauge Sensor(1torr~10^-4torr)

- Cable for Baratron, Throttle Valve(4m)

- Cable for Baratron, Throttle Valve(4m)



10. Vacuum Controller & Frame 류

- Controller Type: 장비일체형(19”)

- Switch on/off Type

- Ivory Paint