Main Processing Chamber Material : Quartz Tube & SUS304L Heating Furnace Dimension: Approx. 600(W) X 300 (H) X 300 (D) - Vacuum Pumping Unit Mechanical Rotary Vacuum Pump (Pumping speed : 400 Liter/Min, Corrosive Type - Formblin Oil) - Heating Source Three Zone Controller Type Max.Temperature:1100℃(on Heater) - Vacuum Gauge Vacuum Gauge & Controller (Convection Gauge, 2ea) Pressure range : 760 Torr~ 10-4Torr - Gas Supply System Processing Gases : Ar, O2, N2, 1ea Spare Gas Pod : Externally mounted gas pod for up to Five MFC Line Gas line : high quality EP grade SUS tube, valves , Filter & MFC