1.Field Emission Scanning Electron Microscope(JSM-7600F) : 1set($258,760)
-Resolution : 1.0nm/1.5nm/3.0nm Guaranteed at 15KV/1KV/5nA
-Magnification: 25 to 1,000,000X
-Image Modes : SEI, BEI(Compo, Topo:Option)
-Accelerating Voltage: 0.1-30KV
-Probe Current: 1*10(-13) to 2*10(-7)A
-Electron Gun : ZrO/W(100) Schottky Type
-SpecimenStage: Fully Eucentric Goniometer Type
-Specimen Movements : X:70mm, Y:50mm, Z:25mm(W/Fine Z), T:-5 to +70˚, R:360˚Endless
* Acc. 19" LCD, Retractable BE Detector, Liquid Nitrogen Trap, Std. Tool Kit2
2.Energy Dispersive X-ray Spectrometer(INCA Energy 350/Oxford, U.K) : 1set($92,500)
1)INCA Platform: -Navigator / -The Advisor / -Information Management Sys. / -Reporting
2)INCA Energy Hardware: -System Computer / -Microanalytical Processor / -Superscan-Advanced Digital Scanning Sys.
-Analytical Silicon Drift Detector(X-Max) / -LN2 Free Type Detector
* Local (\52,470,000)
1)Cooling Water Curculator / 2)UPS(7.5KV) / 3)Imaging System / 4)Thickness Monitor
5)Automatic Magnetron Sputter Coater with Pt Target / 6)Inkjet Color Printer