1. Resolution : 3.0㎚ or better guaranteed at 30kV (SE image High vacuum)
4.0㎚ or better guaranteed at 30kV (BSE image Low vacuum)
2. Magnification : x5 ~ x300000 or wider Digital display on CRT
Preset magnification points : presettable
3. Accelerating voltage : 0.3 to 30kV (1171 steps) or better
0.3 to 9.99kV (100V steps) or better
10 to 30kV (100V steps) or better