(2) 구성
○ Main Chamber
○ insulation & heating System
○ Water Cooling System
○ Vacuum System
○ Gas Supply System
○ Control System & Power Supply
○ Air System
(3) Main System
○ Main Chamber
- 재질 : SUS 304 stainless steel (water cooling Door)
- 유효작업공간 200(W) ✕ 200(D) ✕ 300(H)mm
(내부공간 260(W) ✕ 230(D) ✕ 400(H)mm
- Front Loading Type
- Electrode port
- gas Inlet & Outlet port
- Vacuum Exgaust Port
- 온도 측정용 Port
- Door Clamp & Accessories
- Water Cooling Line & Accessories
- Furnace Case & Frame : Aluminum Profile (60✕60)
Steel Plate (10t, 1.6t)
SUS 304 Angle
- 투시창 PORT
- 진공계기 SENSOR 장착 PORT
○ insulation & heating System ( chamber 표면온도 : 20℃ 내외)
- Ceramic Board 1800 (40t)
- Ceramic Board 1700 (40t)
- Ceramic Board 1600 (40t)
- Ceramic Board 1200 (40t) 를 사용하여 단열
- Super kanthal Heater 1800 160(LE) ✕30(LU), 25A 4/9
(sweden)(로내 온도오차±5℃, 승온속도20℃/min이상)
- 절연애자
- Electrode
- Over heating 방지용 출력 차단 및 경보 Lamp
○ Water Cooling System
- Water Flow Switch
- Water Manifold
- Ball Valve
- Water Cooling Cable & water flow indicater
- 작동이상시 차단 및 경보장치
○ Vacuum System
- Oil Rotar Vacuum Pump (600리터/min)
- Angle Valve
- Vacuum gauge ( ~10-5 Torr.)
- Gauge port
- Motor과부하, Pumping 중단시 Oil 역류 방지장치
- Accessories ( O-Ring, Vacuum 그리이스 )
- Clamp & Center O-Ring
○ Gas Supply System
(최대 4kgf/cm2 까지 가압, 유량 : 약0.2m2/min)
- Gas Flowmeter
- Solenoid Valve
- Check Valve
- Ball Valve
- SUS pipe
- SWG Fitting
- Gas Pressure Switch
- Gas Line
- 작동이상시 차단 및 경보장치
○ Control System & Power Supply
- PID Control로서 최소 9 SEGMENT 이상
Overheating Protector기능
- Digital Ampere & Voltage meter
- SCR Unit (4~20mA)
- Thermo Couple (B-Type)
- Main Breaker Switch
- Control Panel
○ Air System
- Air Solenoid Block
- Air Fitting
- Air Pressure Switch
- 작동이상시 차단 및 경보장치
(4) Accessory
○ 진공 그리이스, O-Ring
○ Super kanthal Heater 1800℃ (sweden)
○ Ceramic Board 1800(40t)
○ Thermo Couple (B-type)