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※ Inlet
- Type
1 to 760 Torr Stainless steel and PEEK capillaries
10 -1 to 10 -4 Torr 1/8" to 1/4" tubing
<10 -4 Torr 2-3/4" CF flange
Flowrate 1 to 10 milliliter per minute at atmospheric pressure
- Mass Spectrometer
Type Quadrupole (RGA)
Detector Faraday cup and electron multiplier
Range 200 atomic mass units (amu)
Resolution Better than 0.5 amu at 10 % of peak height
Detection limit Less than 1 ppm
Operating pressure 5 × 10 -6 mbar