• Two independent, closed-loop XY and Z flexure scanners for sample and probe tip
• Flat and orthogonal XY scan with low residual bow
• Out-of-plane motion of less than 1 nm over an entire scan range
• Z scanner linearity deviation of less than 0.015% over an entire scan range
• Accurate height measurements without any need for software processing

• Sample topography measured by industry leading low noise Z detector
• True Sample Topography™ without edge overshoot or piezo creep error
• Accurate surface height recording, even during high-speed scanning
• Reduced XY scanner ringing by forward sine-scan algorithm
• Industry leading forward and backward scan gap of less than 0.15%

• Industry leading Z-scanner bandwidth of more than 9 kHz
• Fastest Z-servo speed of more than 62 mm/sec tip velocity
• Minimum tip wear for prolonged high-quality and high-resolution imaging
• Minimized sample damage or modification
• Immune from parameter-dependent results common in tapping imaging

• Open side access for easy sample or tip exchange
• Easy, intuitive laser alignment with pre-aligned tip mount
• Easy head removal by dovetail-lock mount
• Direct on-axis optics for high resolution optical viewing
• Fast automatic tip approach to sample surface within 10 seconds
• Park SmartScanTM - AFM operating software versatile enough to empower both
novices and power users alike toward great nanoscale research.
- Auto mode: Automated image acquisition in three easy steps to determine probe setup,
scan position, and scan area.
- Manual mode: Opens various up scan parameters and macro/scripting support
to advanced users for fine-tuned scan control.