Film thickness uniformity : ≤ ±5% on OD 100x100mm substrateFilm composition uniformity : ≤ ±5%Film resistivity : ≤ ohm cmRotation speed : 5～30 RPMDC power supply : 1kW - 3set(Noise Filter)Heating Temperature : Max. 700℃ ± 1%Sample Size : 100mm X 100mmVacuum : 5x10-7TorrRF Power Supply : 300W - 1set, 600W - 1set, (13.56 MHz)Sputtering gun : 4 sputter GunSputtering source : Cu-Ga, In, Mo