- PERFORMANCE

1. Wavelength range : 380 nm~1,000 nm (UV Option: 240 nm-1,000 nm)
2. Beam spot size : ≥ 1.5 mm
3. Measuring constants : Film thickness, n, k vs λ
4. Thickness range : sub Å ~ 10 μm (depends on film type)
5. Number of layers : Up to 10 layers (depends on film type)
6. Throughput(Foot note 1) : 10~15sec. per point (depends on film type)
- Option: High speed measurement 1.5sec. per point
7. Repeatability(Foot note 2) (3σ) : ± 0.3 Å on 10 times measurement
8 Dispersion relations : Cauchy, Sellmeier, Lorentz, Tauc-Lorentz, Quantum-Mechanical and more
9 Providing features : Refractive Index, Extinction coefficient and optical band gap
- Film density and composition
- Material’s dielectrics function library
- User defined model capability
- Data import & export functions
- Extendable library