○ Resoluton :3.5nm(30kV, SE image)
○ Magnification : 30x~300,000x
○ Accelerating voltage : 0.5kV~30kV
○ Electron gun : Tungsten filament, Precentered cartridge filament
○ Lens system : 3-step lens system
○ Objective iris : 4holes variable aperture
○ image shift :±20㎛ (WD: 5㎜)