특징 반도체 물질 및 기타 전기적 특성을 가진 박막이나 소자에 대한 전기적 특성 분석을 DC/AC입력을 통해 그에 상응하는 출력값으로 측정할 수 있는 장비 구성및성능 ● Furnished Applications : More than 200 application testes ● Off-line data analysis and library creation : Desktop Easy EXPERT software ● User Interface Options : Touch screen clickable knob. softkeys, USB keyboard and mouse ● Data Transfer : CD-RW, LAN, USB ● Test algorithm sequencing : Qucik test GUI뭉 sequence test library ● Prober control : Semi-automatic prober driver ● AC capacitance : 1-slot MFCMU ● IV-CV switchng : SCUU, ASU or B2200A/B2201A/E5250A ● Hardware Configurations ● 1-10 MPSMUs ● 1-4 HPSMUs ● 4.2 A GNDU ● no VSU or VMUs ● 2 HV-SPGUs ● Measurement Resolution ● Current : 0.1 fA(HRSMU + ASU), 1fA(HRSMU) ● Voltage : 0.5μV(MPSMU & HRSMU) ● Measurement Accuracy(Offset) ● Current : 15 fA @ 10pA range (HRSMU) ● Voltage : 120 μV(0.5Vrange MPSMU &HRSMU) ● Specialized Measurement Functions ● Standby Mode : Available ● Current Offset Cancel : Available ● High-speed Sampling : 100μsec. minimuim interval with resolution equal to 20,000 counts of full scale ● Logarithmic Time Sampling : Available ● QSCV : Available ● IV Knob Sweep : Not Available ● Remote Control Command Sets : Agilent FLEX VXI plug&play driver 활용분야 TFT 측정 1. 기 구비된 probe station에 연결된 probe에 측정할 TFT소자 설치 및 probe contact(Source, Drain, Gate) 2. Gate에 연결된 단자에 -10~40V 인가, Source에 일정 전압 인가(0~10V), Source~Drain, Gate current 측정