1. Main System
- Basic induction plasma power generator
Power supply : 30 kW, 440V/(3) phase, 2~4 MHz
control console(gas, 냉각, 전기)
- Gas controller : torch sheath gas(0~120 slpm), central gas(0~60 slpm),
quench gas(0~500 slpm)
- Inlet/outlet gas pressure display
- Torch minimum flow alarm system
- Torch : water cooled ceramic tube(Φ35), sheath tube(Φ30)
- Chamber(Φ320×L1500)
- Cooling water : 50 lpm, 20℃, 3 bar