1. This system is 4-circle XRD for high resolution analysis and applications as follows. - Phase analysis and quantitative analysis. - Thickness, density, roughness and phase analysis of thin film. - Stress and Texture analysis. - Rocking curve measurement and Reciprocal lattice intensity map measurements. - Grazing incidence investigations. 2. This system can be mounting of wafer up to 300 mm diameter, complete mapping up to 200mm x 200mm and easy wafer mounting, alignment using self-centering sample holder. 3. The goniometer for this system is equipped for precise angular measurement that guarantees the highest possible positioning accuracy and reproducibility. 4. System allows rapid switching between point and line focus positions without necessary of re-alignment of the system. 5. The PreFIX optical modules are provided for the quick reconfiguration of diffractometer without re-alignment for whole application setup. 6. The receiving slit and the analyzer crystal is exchanged, facilitating reciprocal space mapping measurements. 7. The system must be mounted and measured more than 15 pieces pf wafer automatically. 8. The high resolution & high intensity can be met lower than 15 arcsec and higher than 18 MCPS by monochromator.