1. Features

1. Case
① Size (W*L*H) = 1230 * 910 * 1360 mm ,
② Weight = 500 kg
2. General
① Temperature range : up to 250℃
② Heating rate : 70C/min
③ Pressure range : 1 to 50 bar
④ Substrate handling : up to 8 inch
⑤ Imprinting speed : 7min/wafer (process dependant)
3. UV Imprint (Spot UV source)
① Lamp : 200 W mercury-Xenon lamp
② Lamp life time : over 3000 hr
③ UV intensity : 4000 mW/cm2
4.　Vacuum Pump (Mechanical pump)
① Ultimate vacuum : 6.7*10-2 Pa
② Pumping speed : 60 L/min
5. Others
① Heater : 2000 W, 5 kg
② System control : PLC controlled, automatic
③ Imprinting procedure
- UV
- Thermoplastic
- Thermoset