특징1. Coater 1) Substrate size: up to 4inch substrate 2) Spin speed: 300~5,000rpm 3) Coating uniformity: less than ±2.0% 4) Motor: DC or AC servo motor 5) Spin state: ≥ 100steps 6) Recipe: ≥ 20 storage 7) Spin time: 1~999sec 8) Acceleration/deceleration: 1~999sec 9) Main controller: key pad control 10) Dispensing: manual 2. Developer 1) Substrate size: up to 4inch substrate 2) Spin speed: 100~5,000rpm 3) Motor: AC servo motor 4) Spin state: ≥ 20steps 5) Recipe: ≥ 20 storage 6) Spin time: 1~999sec구성및성능-폴리머 관련 소자제작활용분야-폴리머 코팅 및 현상관련