Stamp Size : Piece~ Max.8" Mask Size
　Substrate Size : Piece~ Max.8" Wafer size
Travel in X, Y : ± 5mm stroke from center : Resolution: 0.1um
Travel in theta:± 5° from center : Resolution: 0.0025°
Lamp & Lamp House : Uniformity : ± 4~6% @ 150mm
Resolution : 1um~2um(NUV mode)
Intensity : 500W(20~25mW/㎠)