* Chamber
- Size : 6 / 8 inch
- Single chamber : 3가지 chemical 사용
- One-shot drain & recycle : Bottle use
- Pre-Fulshing Port : 각각의 Run & chemical 마다 선택적 사용
* Chuck
- Size : 6 /8 inch
- Vacuum check : Vacuum 압력 이상 발생 시 run stop
- RRM : up to 5000 rpm
- Auto centering : wafer maunal loading 시 auto centering 후 run
- No wafer interlock
* dispenser
- 3 Chemicals : 3 chemicals 외 D.I rinse N2 dry dispenser : total 5 dispensers
- Non-drip function
- Motion Profile