◆다양한 contact mode 지원 Vacuum, low vacuum, Hard contact, soft contact, proximity◆Mask-wafer alignment stage x: -10/3 ~ +10/3 , y: -5/3 ~ +5/3 , Θ: -5°/3° ~ +5°/3°◆Topside microscope x: -50 ~ +50 , y: -99.9 ~ +20 , Θ: -4° ~ +4°◆Bottomside Microscope x: -92.5 ~ +32.5 , y: -20 ~ +50 ◆Objective separation : X: 62~185◆Light sensor: 365nm, 405nm