High Efficiency, Uniform 1000w UV Exposure Systemntensity Controlling Power SupplyWide range of options including special alignment Optics. Micron Printing and Precision Alignment System(X,Y,Z and Theta) User Settalble Substrate to Mask Pressure.Automatically Proximity, Soft and Hard Vacuum Contact CapabillityBack Side Alignment Option.Best precise Chuck Motion via Micrometers.(X,Y axis) System Vibration Isolation Connect with wafer holder of anodic bonding system