ㅇGeometry - On a 21 - port specimen chamber the electron and ion column are mounted at 52 degrees to each other. The beam coincidence point is at 10 mm working distance, which is also the eucentric working distance of the stage and the analytical working distance. There are 5 GIS ports grouped around the ion column(of which 4 are freely accessible). ㅇVacuum - The System uses an entirely oil - free vacuum system, featuring: 1) 1 X240 l/s turbo-molecular drag pump 2) 2 X Scroll pumps 3) 3 XIon Getter Pumps (2 for electron column, 1 for ion column) ㅇSample navigation - FIB system is equipped with a 5 - axes motorized x-y-z-rotate-tilt stage. - 5 - axis UHR motorized stage: 1) Mechanically tilt eucentric stage with 5 µm image motion when tilting 0도 to 52도 2) X,Y = 50 mm 3) Z = 10 mm 4) T = - 10도 to + 60도 5) R = 360도 stroke 6) Tilt accuracy (between 50도 to 54도) 0.1도 7) X,Y repeatability +/- 0.5 um