시료의 3차원 형상 및 치수 측정용
"Measuring system : CNC 3D Measurement- XYZ stage stroke : 150x150x150mm- Laser : High speed TTL laser- Autofocus : TTL laser AF and Vision AF- 3D Surface analyzer- WD : 50mm- Total magnification : 72X~1080X- XY Stage repeatability (2 sigma) : 0.75 µm- Z-axis repeatability (2 sigma) : 0.5 µm- Illuminator : Halogen / 8-segment LED ring- Auto Measure software Measuring system : CNC 3D Measurement- XYZ stage stroke : 150x150x150mm- Laser : High speed TTL laser- Autofocus : TTL laser AF and Vision AF- 3D Surface analyzer- WD : 50mm- Total magnification : 72X~1080X- XY Stage repeatability (2 sigma) : 0.75 µm- Z-axis repeatability (2 sigma) : 0.5 µm- Illuminator : Halogen / 8-segment LED ring- Auto Measure software
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