Mask Aligner : 15.24cm(6inch) wafer applicable- Spin coater : 15.24cm wafer applicable- Hot plate : Temp. range ~ 500˚C - Spinner1 (PR, ORG) : 15.24cm wafer applicable- Spinner2 (ACID) : 15.24cm wafer applicable- Wafer stocker/work table : Class 100 environment compatible- Refrigerator (PR) ; PR, chemical stocker- Hood (spin coater/hot plate/ultrasonic cleaner) : Class 100 compatible- Spin coater : 15.24cm wafer applicable- Hot plate : Temp. range ~ 500˚C - Spinner1 (PR, ORG) : 15.24cm wafer applicable- Spinner2 (ACID) : 15.24cm wafer applicable- Wafer stocker/work table : Class 100 environment compatible- Refrigerator (PR) ; PR, chemical stocker- Hood (spin coater/hot plate/ultrasonic cleaner) : Class 100 compatible