박막두께측정, 표면거칠기측정
"Step Height Precision Scanner- Zoom Optics ( 88 x 237X ) - Stylus, 5 um Radius 60 - Manual precision X-Y stage, 6.2"" diameter theta table - General Performance :- Scan Length : 10 mm- Scan Speed : 2 um/sec to 200 um/ sec- Scan Method : Bi-directional moving stylus - Sampling Rate : 50, 100, 200, 500 , 1000 Hz- Vertical Range / Resolution : +/- 20 um / 0.1 A 400 um / 0.3 A 2000um / 1 A- Stylus Force : Adjustable between 1-100 mg- Repeatability : Step Height Repeatability, 1 : 0.8 nm in the 13 um range
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