1. Resolution
2. Magnification
3. Acceleration Voltage
4. Detection System
5. Electron Gun
6. Frame Memory(pixels)
7. Display(Monitor)
8. Sample stage
9. Maximum Sample size
10. Thickness
11. Auto adjustment function

12. Vacuum System
13. Observation mode
14. Sample load time
15. Dimensions & Weight
16. Image Save
17. Light Optical
18. EDS System
19. Temperature / Humidity
20. Power source

10nm
20x ~ 30,000x
1kv ~ 30kv(variable)
SE (Secondary Electron)
Tungsten Filament(cartridge)
320×249, 800×600, 1,280×960, 2,560×1,920 15″
X : 20mm, Y : 20mm, R : 360˚
75mm
35mm
Auto start, Autofocus,
Auto Brightness
Rotary Pump + Turbo Pump
High vacuum
3 min
490(W)×520(D)×540(H)mm / 80kg
BMP, JPEG, PNG, GIF, TIFF
×
EVEX, BRUKER, EDAX
22℃ ±5℃ / 80% RH or less
Single phase 220 ~ 240V AC, 1KW, 50/60Hz