특징
시료에 전자빔을 주사하였을때 발생하는 발광, 즉, 음극선 발광을 분광분석 할 수 있는 장비

구성및성능
CL system for high-resolution imaging and spectroscopy.
Direct optical coupling to chamber mounted monochromator
Retractable, detachable diamond turned paraboloid mirror
LED mirror position indicator
System electronics for control of monochromator and detector(s)
Manual Remote Unit for imaging control
Photon counting spectroscopy + linear mode for imaging
Single grating, (1200l/mm, 500nm blaze as standard)
Fused silica optics
High Sensitivity PMT detector, Peltier cooled with integral pre-amplifier (160nm to 930nm)
Windows based CL software with autocalibration routine

활용분야
재료 특성 분석