구성및성능
- Step Height Repeatability: Guaranteed 6 angstrom 1 sigma
- Unique Linear Scan
- Step Detection Feature
- Scan Length Range: 50um to 55mm
- Vertical Measurement Range: 524um maximum( 1mm maximum optional)
- Stylus Replacement: Exclusive quick-change
- Stylus Force: Programmable stylus force from 1-15mg
- Sensor Technology: Exclusive LIS 3 sensor with linear variable differential transfomer(LVDT) with1Angstrom resolution.
- Maxiumum Data Points: 60000 data points per scan
- CCD Camera : Color 160x magnification video (optical 100x to 640x zoom optional)
- Analytical Software: 30 analytical funtion for calculating step height geometries roughness and waviness parameters
- Environmental Enclosure scan area form air currents accoustic noise and contamination