Vertical type 1Chamber system
Cassette auto loading system
공정명
In-situ doped Poly-Si depo.(PH3)
공통사항
Temp rate : 300~850℃
Flatzone : 800mm±1℃
Temp ramping up : 3~8℃/min
Heater material : Kanthal A1
Number of accommodated cassettes : 8
Temperature control : DDC,PID control
Control points : 4zones
Resolution : 0.1℃
Precision : ≤±1.5℃