·RE Generator/Control : ~1,500W/40.68MHz/1W adjustable Free Running with Solid State/혼합방식·Gas control : Mass Flow Control (MFC)·Torch ass’y : Standard(Quick Change Torch), Module, HF Resistance·플라즈마 관측방식(Viewing Method) : Optimized dual (Axial + Radial) adjustable viewing height·회절발 (grating) : Echelle grating with schmidt cross disperser and prism 160Xf80mm (12,800sq mm) 초점거리 및 분해능 : 500mm, 0.006nm at 200nm 파장범위 : 163 ~782nm