- PCB size : 50~410mm
- total heater length : 2700
- 상부10존, 하부10존/Heating Zone Count
- cooling zone count : 2존
- cooling 방식 : chiller 냉각식
- N2 gas 소모량 10~12m2/h
- 제어방식 : PC control
- power supply :3P 220 or 380(50/60hz)
- Air 압력 : 5kg/cm2
- Dimension(L) : 4,938
- weight(Kg) : 2,800