- SPM Head : 접촉식 AFM, DFM, 비접촉식 AFM, FMM, Phase Image, Force vs. Distance curve, DC-EFM, Current AFM, I/V spectroscopy - Scan length : 100 ㎛ (low voltage mode : 10 ㎛) - Scan Speed : 2 ㎛ /sec to 200 ㎛/sec or more Vertical range : 262 ㎛ or more - Resolution < 0.15 nm (low voltage mode : < 0.02 nm) - Zoom optics : 500 X - Stylus Tip : 5 ㎛ or more - Sample size : Up to 200 mm x 200 mm, 20 mm thick