Specification Rotation Unit Accuracy : 0.06㎛ Table Size : 600mm×460mm Drive Range : X:800mm Y:±50mm Mechanical Centering/Tilting Range : Max±50mm/±5mm/340mm Vertical Column Straightness Accuracy :1.0㎛/200mm Parallelism : 1.0㎛/100mm Vertical Motion Range : 1000mm Measuring Force/Range : 0-1000mN(10gf)Variable 1800㎛ Range/Positioning Display : 150mm Min. Display0.001mm Measuring Range Measuring Size/Loading Capacity : ID, 0D450mm200kg Measuring Height / Loading Size : 1010mm㎛ø580mm