FIBERPRO
FA6000 A-AWG02
10년
주장비
시험
기계가공·시험장비 > 반도체장비 > 달리 분류되지 않는 반도체장비
2007-12-11
394,790,000원
기관의뢰 직접사용
고정형
시간별
65,000원
Athermal AWG 정렬 및 접합
Precise wavelength peak searching (blind search)
- High system repeatability less than 0.05 dB
- High speed automatic alignment / positioning within 10 minutes (fine mode)
특징
- Precise wavelength peak searching (blind search)
- High system repeatability less than 0.05 dB
- High speed automatic alignment / positioning within 10 minutes (fine mode)
- AWG center jig temperature monitoring&controller
- User friendly programmable GUI
- Easy integration with optical test system
1. Alignment Performances
- Accuracy of input/output stages ㆍX/Y axis alignment error : ±100 nm ㆍZ axis DUT access position: 500 nm ㆍTx alignment angle error : ±0.05° ㆍTy alignment angle error : ≤ ±0.01° ㆍTz alignment angle error : 0.0032° - Optical alignment accuracy ㆍPeak wavelength error : ±20 pm ㆍI.L. uncertainty : ≤ ± 2 % ㆍI.L. dynamic range : 60 dB ㆍI.L. repeatability : ±0.05 dB (STD) ㆍAlignment speed : 5 min. - Temperature controller for AWG center jig ㆍSet range : 20~85 ㆍUncertainty : ±0.2 ㆍMaintaining error : ±0.4 ℃ - Temperature monitoring for AWG center jig ㆍ 2 corners on upper side : ±0.1 ㆍ 2 corners on lower side : ±0.1 Simultaneous monitoring of 4 points 2. UV Curing System - Lamp : High ressure 200W, mercury vapor short arc - Lamp life : 2000 hrs - Warm-up period : ≤ 4 min 3. Dispenser System - Input pressure : 0~10/0~2 kg/cm2 - Time range : 00.01~99.99 sec - Interval timer : 0.01~3.99 sec, 0.01~5.99 min - Vacuum pressure : 0~-350/0~-680 mmHg
구성및성능
- 다채널 AWG chip에 대한 자동정렬 및 측정 시스템
활용분야
- 다채널 AWG chip에 대한 자동정렬 및 측정 시스템 - 수동소자에 대한 최대 40채널까지의 광학특성 측정