써모니크
GVF
10년
주장비
시험
기계가공·시험장비 > 반도체장비 > 열처리장치
2007-11-19
155,100,000원
기관의뢰
고정형
시간별
69,200원
과제명 : 반도체광원 시험생산 기술지원사업
과제책임자 : 김왕기
Baking Furnace spec
Baking Furnace
heat zone 650 X 650 X 600(H)(mm). 수용가능
Max temp 1450 도
진공도 10 -2torr
Gas N2, H2
Heater Graphite
Insulation Graphite
* Heat zone 사이즈는 변경가능합니다.
1. Furnace system
① Temperature : Max. 1450 도
② Atmosphere : Vacuum, H2, N2
③ Chamber size(inside) : 600×600×600 (mm)
④ Power : AC 380V, 3Phase, 60Hz, 65kVA
⑤ Cooling water : 40 L/M
⑥ Gas pressure : 1~3 kg/cm2 (0.1~0.3 MPa)
⑦ Air : 3 kg/cm2 (0.3 MPa)
⑧ Heater : Graphite plate (double side heater)
⑨ Heat insulator : Graphite form
⑩ Electrode : Graphite
⑪ SUS 304 water cooling chamber with rack, rectangular chamber
⑫ Zig : 1 set
⑬ NW25 port for leak check
2. Control system
① Separate control panel
② Auto / manual Control
③ Temperature controller : Programmable digital PID Controller (KP1000, Chino, Japan)
④ Recorder : SR1000 (Yokogawa, Japan)
⑤ Heat Transformer : ISHIKAWA(Japan), Scott wiring, 380V / 30V×2, 65 KVA
⑥ PLC Controller : MITSUBISHI(Japan) Fx series
⑦ R type thermocouple : 2 ea
⑧ Water cooled power cable : water cooled Cu electrode included, 4 set
⑨ Current meter, Voltage meter, Breaker, Magnetic S/W, Relay, Lamp Button etc.
3. Vacuum system
① Dry Pump
- Pumping speed : 8400 L/M
- Flow gas : N2 gas
- NW40, cooling water : 4 L/M
- Main valve : NW40
② Filtering system : Case , filter (3 ea)
③ Digital Pirani vacuum gauge
④ Leak v/v, flexible (NW40) & vacuum line
heat zone 650 X 650 X 600 (mm)
MAX TEMP 1450도
진공도 10 -2 TORR
GAS N2, H2
HEATER : GRAPHITE
ZIG : 1 SET